Micro Fabrication Technology Centre
Introduction
HKPC's Micro Fabrication Technology Centre facilitates the adoption of non-silicon micro-fabrication as an enabling technology by the local R&D community and high-tech companies. The Centre is engaged in the promotion, dissemination and commercialization of micro-fabrication applications, as well as the co-ordination and integration of diverse technologies that go into micro-fabrication.
Micro-injection moulding
Objectives
- To acquire the know-how and experience in micro-fabrication for non-silicon MEMS
- To develop enabling technologies in micro-machining, micro-EDM, micro-injection moulding as well as ultra precision hot embossing
- To develop industrial applications of miniaturized products via micro-production
- To support the micro-engineering R&D community and technology intensive industries via bureau services
- To provide technical seminars and hands-on training programmes
Services
Single Point Diamond Turning (SPDT)
Single Point Diamond Turning (SPDT)
Precitech Nanoform200
- A single-crystal natural diamond cutting tool is used to generate surface on a non-ferrous substrate with submicron dimensional tolerances.
- Each linear axis provides 8.6nm positioning feedback resolution.
- Applications include fabrication of high-precision microlens and micro-groove machining.
4-axis Freeform Machining
4-axis Freeform Machining
Precitech Freeform 204
- The ultra-precision, 4-axis computer controlled machine centre is equipped to undertake various kinds of micro-optical and mechanical component manufacturing and micro mould making.
- Three dimensional freeform milling, 2-axis diamond turning, linear and variable pitch micro-grooving.
- Applications include freeform microlens and micro-mould inserts.
Micro-EDM
Micro-EDM
SARIX HPM
- For micro-holes, micro-machining and micro-forms
- High precision micro-holes and shape holes down to 20 microns
- High precision positioning accuracy up to +/- 1 micron
Case Studies
Asymmetric Aspheric Lenses in Photonics
- Low cost 10G 850nm VCESEL packages. This completely new and precise lens system will be used in transmitters and receivers of high speed board band systems.
- This is a 3-mm in length, off-axis asymmetric lens system with form accuracy up to nano scale.
- HKPC is the only available source in Hong Kong to provide a cost-effective manufacturing platform.
- The system has a total of four optical surfaces, including a hemispherical surface and an asymmetrical aspheric surface at the two ends, and a plano rectangular surface and cylindrical surface on the two sides.
Asymmetric Aspheric Lenses in Photonics
Micro-fabrication of Micro-pin Lens
- It is a lens system with critical requirements in high reliability and low cost.
- Owing to the lens size (less than 0.5mm in diameter), the lens prototype cannot be machined directly using a commercially available precision machine.
- HKPC developed an innovative quick mould platform for precision lens production for design evaluation.
- It was the first project undertaken in Hong Kong in precision electro-forming and micro-fabrication technology for such a small sized lens.
Micro-fabrication of Micro-pin Lens
Micro-optical Components for Data Transmission
- This is an opto-electronic component machined with form accuracy up to single-digit micron.
- There are three critical parts in this module, including precision lens, laser and fibre cables for transmitting the data in fibre optics.
- This new opto-electronic system can be applied in different modules. It will carry signals with much less energy loss than the current one in the market, and with a much higher bandwidth as well.
Micro-optical Components for Data Transmission
Micro-optical Components for Data Transmission
Non-silicon Micro Pump
HKPC successfully develops cost-effective non-silicon micro pump by micro-fabrication. In Micro Electrical and Mechanical System (MEMS), the adoption of non-silicon material, like polymer, is growing owing to the availability of low-cost and high-volume fabrication. The micro pump is a non-silicon MEMS jointly developed with Scuola Superiore Sant' Anna from Italy. The development opens up the technology and opportunity in micro-fabrication for medical devices.
Non-silicon Micro Pump
Micro Pump Manufacturing Process
1. Embossing tool fabricated by micro-machining/micro-EDM
2. Embossing tool embedded into Ultra-precision Hot Embossing Machine
Under pressure and temperature cycle to replicate the micro-channels onto the PMMA substrate.
2. Embossing tool embedded into Ultra-precision Hot Embossing Machine
3. PMMA substrate of Micro Pump before and after hot embossing (Length x width: 15mm x 9mm)
Critical dimensions of the Micro channels are down to micron-scale. Average roughness at measured regions is of sub-micron level. Form errors of top and bottom surface are of single-digit microns.
4. Assembly of Micro Pump
4. Assembly of Micro Pump
5. Completed Micro Pump
5. Completed Micro Pump
Specification
- Dimension: 25mm x 20mm x 3mm
- Material of micro-fluidic component: Polymethyl methacrylate (PMMA)
- Maximum flow rate: 70μl/min
- Applied signal: 100 V p-v square wave signal at 2.3KHz
